5kV beam image comparison

Less is More

Smaller focal spots and interaction volumes allow more precise machining

Do you have a FIB system that has done some great work but is now languishing? You've already paid to site the tool, keep it running, and promote its availability. With an ion source upgrade you can turn that FIB into one capable of generating new scientific breakthroughs.

zeroK NanoTech Corporation is beginning deployments of its Low Temperature Ion Source (LoTIS). FIBs equipped with an upgraded ion source will break new scientific ground without the need to replace an entire platform.

For examples retrofit FIBs, see our completed Cs+ and Li+ systems below.

  • Cs+ ion beam with nanometer resolution
  • 10+ nA beam current (Cs+)
  • Superior performance at low beam energy
  • Compatible with most ion beam columns & accessories
  • Machine with higher precision than with Ga+
  • Explore new applications with unprecedented performance
  • Utilize a wide range of currents to handle a variety of tasks
  • Extract additional value from existing capital equipment

Contact us to discuss your application today!


Imagine obtaining EDX-like spectra without time-consuming trenching and lift-out. Imagine collecting SIMS data 100X faster and with ultimate spatial resolution. Imagine machining resolution better than any other FIB on the market.

Now imagine all of it in a single platform.

zeroK NanoTech and the Luxembourg Institute of Science and Technology are aiming to join together to deliver an entirely new class of analytic instrument. We are leveraging new Low Temperature Ion Source technology to achieve heretofore unprecedented levels of performance.

Available Late 2019

  • Cs+ ion beam with nanometer resolution
  • 10+ nA beam current (Cs+)
  • Full-featured FIB system
  • Highest resolution SIMS
  • Parallel readout of all masses
  • Obtain EDX-like spectra...without lamella prep!
  • Gather SIMS data 100X faster
  • Machine with higher precision
  • Endpoint using mass spectra
  • Nanofabrication process control using SIMS

Contact us to discuss your application today!

2 nm Cesium (Cs+) FIB

Demo FIB

zeroK completed construction of a Cs+ Low Temperature Ion Source (LoTIS) demo FIB in the fall of 2016. This instrument is now online and proves LoTIS technology works. For the full details, see our publication. The latest news about this instrument can be found on the news page.

The LoTIS was retrofit onto a gallium LMIS-based FIB platform. The upgraded system can deliver 2 nm spot-sizes at a beam energy of 10 kV. Prior to the upgrade the system only was able to provide 5 nm spots at 40 kV. Beam currents over 3 nA can also be provided for larger volume milling operations.

The system also offers a full range of gas chemistries including bromine, xenon difluoride, oxygen and TMCTS for etch enhancement. Tungsten is available for deposition.

  • 2 nm Imaging Resolution
  • Beam energies up to 10 keV
  • Currents up to 3 nA
  • Gas chemistries for etch or deposition
  • Patterning engine of the base Vectra FIB platform
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Unique Lithium (Li+) FIB

Lithium FIB

This was the first FIB system built featuring zeroK's ion source technology. Constructed at NIST this system has in the intervening years served a a unique platform for investigations of lithium implantation and diffusion.

  • In Service 8+ years at NIST
  • Retrofit FEI FIB-200
  • 30 nm Imaging Resolution
  • 100 pA Beam Current
  • World-Unique FIB
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Low-Temperature Ion Source (LoTIS)

Colder Atoms

Employing Nobel-prize winning techniques from the field of laser cooling, the LoTIS first creates a cold beam of atoms, just a few millionths of a degree above absolute zero! This beam of atoms is then photoionized in an electric field to create an extremely cold ion beam. By removing the heat, and thereby the randomness, from its ions, FIBs employing a LoTIS will be able to more sharply focus their ion beams.

Brighter Ions

In slightly more technical terms, the LoTIS will have a higher brightness brighter and smaller energy spread than the industry standard technology, the liquid metal ion source (LMIS). Higher brightness enables more current in a smaller focused spot, while reduced energy spread mitigates chromatic aberrations. The result is a source of ions for FIB applications that provides high-precision operation over a wide range of beam energies. zeroK has developed a LoTIS that produces cesium ions which would allow for an integrated elemental mapping tool (using Secondary Ion Mass Spectrometry) in combination with nanomachining capabilities. Updates in the development of LoTIS technology can be followed on the News page.

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